Research, Development, Manufacturing and Characterization

• Pellistor type gas sensors for flammable gas detection
• Tagouchi type gas sensors
• 3D vectorial force and tactile sensors for automotive, robotic and medical applications
• Capacitive pressure sensors
• Calorimetric flow sensors
• Microbolometers
• Microthermopiles for temperature monitoring
• Thermopile antennas for detection of THz range radiation
• Surface Acoustic Wave (SAW) devices
• Optical detection of dissolved gasoline in ground water
• Development of optical sensing in near-IR range
• Cortical and deep brain elevtrodes for monitoring neural activity - NeuroMEMS
• Microfluidic devices, Lab-on-a-Chip systems
• Nanopore based biochemical sensors for multi-parametric biomarker detection - BioMEMS
• Semiconductor Nanostructures - NEMS
• E+GRID system