Research, development and system integration of micro- and nanosized physical, chemical, bioanalytical sensors and systems.

Fundamental research on:

• Sensing principles;
• Novel materials and nanostructures;
• Novel 3D fabrication techniques;
• Ion-solid interaction for supporting MEMS development.

Research and development of physical, chemical/biochemical sensors and integrated systems: 

• R&D on micropellistor-type gas sensors, 3D force sensors, thermal sensors, gas flow sensors, using CMOS compatible and related techniques - MEMS.
• Development of novel microfluidic systems, their application in new fields of biochemistry - BioMEMS.
• Development of Si- and polymer based sensors for biomedical applications with special focus on neuroscience - NeuroMEMS.
• Synthesis and characterization of quasi-one-dimensional semiconducting nanostrucrures, semiconductor nanodevices, their integration into functional sensors, optoelectronic and photovoltaic devices - NEMS.

Modelling, structural and device characterizations:

• Electrical characterization;
• Thermo-mechanical characterization;
• Scanning Microprobes;
• Ion beam analysis;
• SEM, TEM, EDX;
• Spectroscopic Ellipsometry;
• Functional tests.

​Operates the CMOS compatible Si technology line, unique in Hungary.