Patterning

• Mask shop - 1 micrometer resolution

   ¤ Laser Pattern Generator
   ¤ Chromium mask design and manufacturing (4 - 7 inch)
   ¤ Direct wafer writing (3 - 6 inch)

• Optical Lithography - 1 micrometer resolution

   ¤ Substracting patterning
   ¤ Lift-off patterning
   ¤ High aspect ratio SU-8 photoresist
   ¤ Double side alignment
   ¤ Prebond wafer alignment

• E-beam Lithography - Resolution below 20 nanometer (4-6 inch wafer)

Thin Film Deposition    

• Chemical
• Physical
   

CMOS Related Technologies    

• Ion Implantation    
• High Temperature Pocesses

Chemical Processes    

• Wet 
• Dry
   

System Integration    

• Polymer Technology
• Packaging
   

Functional Analysis    

Simulation

• Technology and process simulations
• Monte-Carlo process simulation
• Device simulation
• Spice circuit modelling
• Finit element modelling: mechanical, thermal, electric, fluid, dynamical, coupled modelling.

Characterization

• Electrical
• Surface profiling
• SEM, TEM, AFM, EDS
• Functional tests: mechanical, chemical, biochemical, fluidical, etc.